Features/Benefits:

• Low natural frequency
• Automatic leveling and height control, within .005"
• Vertical and horizontal isolation
• Internal damping for improved stability
• Gross loads: 200 to 20,000 lbs.
• Four standard heights
• Custom heights and configurations for OEM applications
• Class 100 Cleanroom Compatible – Class 10 available

The Series 1206 VIBRAPLANE Individual Mounts are ideal when designing or retrofitting sensitive equipment. They use the same isolation techniques as our workstations and platforms, and perform exceedingly well in new equipment or to retrofit existing applications that don’t fit the standard table or platform.

VIBRAPLANE mounts are offered in active and slave configurations. Active mounts use the VIBRALEVEL Air Servo Valve to feed or bleed air from the mounts to maintain preset “zero deflection” and compensate for load changes. Since the easiest way to establish a plane uses three points, three active mounts should be used per system regardless of the total of number of mounts used.  Slave mounts do not have Air Servo Valves but are slaved (controlled) by one of the active mounts. The number of slave mounts is a function of configuration and load.

VIBRAPLANE individual mounts use Kinematic pistons, however, two-stage pendulum airmount systems are available.

Inertia masses or bases are also available. Contact our engineers for design and installation assistance.

For vacuum compatible mounts, nonmagnetic mounts and mounts made of specialty materials please consult engineering.

Options

• Damping tank
• Class 10 compatibility
• Portable air compressor

Typical Applications

OEMs, Steppers, Laser Trimmers, Automated Wafer Inspection, Profilometers, Surface Measurement Instruments, and Inertia Masses and Bases.